A compact mass spectrometer for plasma discharge ion analysis
- 1 June 1996
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (6) , 2215-2220
- https://doi.org/10.1063/1.1147039
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Composition of the oxygen plasmas from two inductively coupled sourcesJournal of Vacuum Science & Technology A, 1995
- Measurement of ion species ratio in the plasma source ion implantation processJournal of Applied Physics, 1993
- An omegatron mass spectrometer for plasma ion species analysisReview of Scientific Instruments, 1990
- Mass spectrometric studies of positive ions in r.f. glow dischargesThin Solid Films, 1989
- Ion beam divergence characteristics of two-grid accelerator systemsAIAA Journal, 1978
- Construction of a wien filter heavy ion acceleratorNuclear Instruments and Methods, 1974