Low-loss thin-film LiNbO_3 optical waveguide sputtered onto a SiO_2/Si substrate
- 15 May 1993
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 18 (10) , 811-813
- https://doi.org/10.1364/ol.18.000811
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
This publication has 11 references indexed in Scilit:
- LiNbO3 thin-film optical waveguide grown by liquid phase epitaxy using Li2O-B2O3 fluxApplied Physics Letters, 1992
- The photoinduced metallo-organic decomposition process: a novel technique for dielectric thin-film growthIEEE Electron Device Letters, 1992
- Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputteringJournal of Applied Physics, 1992
- Study of the optical properties of rf sputtered lithium niobate thin filmsIntegrated Ferroelectrics, 1992
- Linear electro-optic effect in sputtered polycrystalline LiNbO3 filmsApplied Physics Letters, 1989
- Properties of four-layer planar optical waveguides near cutoffIEEE Journal of Quantum Electronics, 1987
- Lithium niobate: Summary of physical properties and crystal structureApplied Physics A, 1985
- Optical waveguides of single-crystal LiNbO3 film deposited by rf sputteringApplied Physics Letters, 1974
- Solid-solution range of LiNbO3Journal of Crystal Growth, 1974
- Light Waves in Thin Films and Integrated OpticsApplied Optics, 1971