Modulation-doped AlInAs/InP heterostructures grown by organometallic vapor phase epitaxy

Abstract
We have grown modulation-doped AlInAs/InP heterostructures with two-dimensional electron gases. Hall measurements and Shubnikov-de Haas oscillations observed in these heterostructures yield electron mobilities as high as 26000, 9000, 2300 cm2/V s at 2, 77, and 300 K, with electron concentrations as high as 1.5×1012 cm−2. These results demonstrate the potential of the AlInAs/InP heterostructure for power microwave applications.
Keywords