Optical Properties of Polycrystalline Silicon Films
- 1 January 1985
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 23 references indexed in Scilit:
- The one phonon Raman spectrum in microcrystalline siliconPublished by Elsevier ,2002
- Growth and Physical Properties of LPCVD Polycrystalline Silicon FilmsJournal of the Electrochemical Society, 1984
- Properties of Thermal Oxides Grown on Phosphorus In Situ Doped PolysiliconJournal of the Electrochemical Society, 1983
- High quality polysilicon by amorphous low pressure chemical vapor depositionApplied Physics Letters, 1983
- Polysilicon / SiO2 Interface Microtexture and Dielectric BreakdownJournal of the Electrochemical Society, 1982
- Raman scattering from hydrogenated microcrystalline and amorphous siliconJournal of Physics C: Solid State Physics, 1982
- Physical and Electrical Properties of Polycrystalline Silicon Thin FilmsMRS Proceedings, 1981
- Electroreflectance and Raman scattering investigation of glow-discharge amorphous Si:F:HSolid State Communications, 1980
- Silicon Oxidation Studies: Morphological Aspects of the Oxidation of Polycrystalline SiliconJournal of the Electrochemical Society, 1980
- Raman study of laser annealed siliconSolid State Communications, 1979