Measurement and Analysis of the Static Debye-Waller Factor of Cz-Silicon with Small Oxygen Precipitates

Abstract
The static Debye-Waller factor and its dependence on the crystal perfection have been obtained through the detailed analysis of the intensity distribution in X-ray diffraction topograph for heat-treated Cz-silicon crystals. The size and density of oxygen precipitates have been determined using the experimental and calculated static Debye-Waller factors and the results of the infrared absorption experiments.