Room temperature oxidation enhancement of porous Si(001) using ultraviolet–ozone exposure
- 1 November 1996
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 80 (9) , 5415-5421
- https://doi.org/10.1063/1.362728
Abstract
No abstract availableThis publication has 29 references indexed in Scilit:
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