Programming of ROMs after metal definition using MEV ion implantation
- 1 January 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 21 (1) , 116-119
- https://doi.org/10.1016/0168-583x(87)90808-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- MeV implantation for VLSINuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985
- Effect of electron trapping on IGFET characteristicsJournal of Electronic Materials, 1977