Channeling of B and As near the silicon 〈001〉 axis
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1) , 75-77
- https://doi.org/10.1016/0168-583x(86)90256-9
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Three-Dimensional Monte Carlo Simulations--Part I: Implanted Profiles for Dopants in Submicron DeviceIEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 1984