Squeeze film damping effect on a MEMS torsion mirror
- 21 June 2002
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 12 (5) , 556-561
- https://doi.org/10.1088/0960-1317/12/5/307
Abstract
No abstract availableKeywords
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