Ratio techniques in Auger electron microscopy: SNR considerations
- 1 April 1991
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 2 (4) , 312-317
- https://doi.org/10.1088/0957-0233/2/4/008
Abstract
The author examines the relation between the noise content of the energy-filtered secondary electron current and the dispersion of the signal combination obtained from various ratioing algorithms used to suppress spurious contrasts in analytical electron microscopy, primarily in the Auger mapping mode. It is shown that the usual ratioing schemes can also be used for very low signal counts. The choice of algorithm is not a critical factor for the signal-to-noise ratio.Keywords
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