Quantitative Auger Electron Spectroscopy with Elemental Sensitivity Factors

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Abstract
An ultrahigh vacuum scanning Auger microprobe (SAM) system was used to obtain elemental sensitivity factors from selected metal alloys and oxides. The specimens were prepared to establish surface compositions equivalent to bulk concentration levels. Two-dimensional surface topographical and compositional SAM studies were made to determine the extent of impurity segregation or precipitation. Relative elemental sensitivity factors computed from published data were applied to ductile fracture surface measurements of Inconel and stainless steels. The metal alloy surface concentrations were compared to bulk concentrations. Relative elemental sensitivity factors were obtained from abraded surfaces of magnesium oxide, aluminum oxide, and silicon dioxide at primary beam energies of 3,5, and 10 keV. The results from fractured and abraded standards were compared to measurements made after sputtering with argon ions.

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