Stress analysis at singular points of micromachined silicon membranes
- 1 August 2000
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 84 (1-2) , 109-115
- https://doi.org/10.1016/s0924-4247(99)00350-7
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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