An interchangeable silicon pressure sensor with on-chip compensation circuitry
- 1 July 1989
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 18 (3-4) , 239-245
- https://doi.org/10.1016/0250-6874(89)87031-3
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- MOS Integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1985
- Integrated piezoresistive pressure sensor with both voltage and frequency outputSensors and Actuators, 1983
- Integrated signal conditioning for silicon pressure sensorsIEEE Transactions on Electron Devices, 1979
- Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensorsIEEE Transactions on Electron Devices, 1979
- Piezoresistive Properties of Silicon Diffused LayersJournal of Applied Physics, 1963