Secondary electron emission and surface potential of SiO2 film surface by negative ion bombardment
- 1 May 1998
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 141 (1-4) , 645-651
- https://doi.org/10.1016/s0168-583x(98)00168-2
Abstract
No abstract availableKeywords
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