Use of GeH4 and GeF4 in a-Si photovoltaic cell manufacture: Hazard assessment and management options
- 30 September 1989
- journal article
- Published by Elsevier in Solar Cells
- Vol. 26 (4) , 269-291
- https://doi.org/10.1016/0379-6787(89)90087-2
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Hazards from radio-frequency and laser equipment in the manufacture of. cap alpha. -Si photovoltaic cellsPublished by Office of Scientific and Technical Information (OSTI) ,1985
- Planar magnetron sputtering of a-Si:H and a-Ge:H thin filmsJournal of Vacuum Science & Technology A, 1984
- Preparation of photoconductive a-SiGe alloy by glow dischargeJournal of Non-Crystalline Solids, 1983