Silicon thermal flow sensor with a two-dimensional direction sensitivity
- 1 July 1990
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 1 (7) , 565-575
- https://doi.org/10.1088/0957-0233/1/7/005
Abstract
The design and testing of a new type of silicon sensor to measure the magnitude and direction of a fluid flow is described. The measurement principle is based on the detection of flow-induced temperature differences on a hot sensing surface. By measuring temperature differences in two directions perpendicular to each other, a full 360 degrees sensitivity can be obtained. The sensor is made of a silicon IC, on which the flow-induced temperature differences are measured with integrated thermopiles. The use of an IC sensor allows the realisation of a compact multicomponent sensor, which can easily be combined with electronic circuitry. Calibration measurements are presented for air flow.Keywords
This publication has 8 references indexed in Scilit:
- The behaviour of a thermal-gradient sensor in laminar and turbulent shear flowJournal of Physics E: Scientific Instruments, 1989
- Integrated silicon flow-direction sensorSensors and Actuators, 1989
- Signal conditioning on the sensor chipSensors and Actuators, 1986
- Thermal sensors based on the seebeck effectSensors and Actuators, 1986
- Monolithic integrated direction-sensitive flow sensorIEEE Transactions on Electron Devices, 1982
- Integrated silicon anemometerElectronics Letters, 1974
- The effect of thermal conduction of the wall upon convection from a surface in a laminar boundary layerInternational Journal of Heat and Mass Transfer, 1967
- Contributions to the theory of heat transfer through a laminar boundary layerProceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, 1950