A multipurpose scanning probe microscope
- 1 September 1993
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (9) , 2591-2594
- https://doi.org/10.1063/1.1143872
Abstract
A versatile scanning probe microscope is described that offers the combination of use for imaging in ambient atmosphere, under a liquid, and in ultrahigh vacuum. In contrast to any home‐built or commercial instruments available at present, these features are realized here in a single instrument. A compact size instrument is achieved by a piezoelectrically driven sample approach mechanism. The sample or the tip can be scanned providing two separate scanning modes which cover a total scan range from 20 Å to 10 μm. An area of 30 mm2 can be scanned without breaking the tip/sample contact. Exchangeable tip mounts facilitate an easy change between prealigned tips. The design of the scanning force microscope is based on the optical deflection method for imaging in the contact mode. The microscope can be used as a scanning tunneling microscope as well.Keywords
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