Effect of non-stoichiometry on the optical properties of thin films of TiNx
- 1 December 1976
- journal article
- research article
- Published by Taylor & Francis in Philosophical Magazine
- Vol. 34 (6) , 1191-1195
- https://doi.org/10.1080/00318087608227740
Abstract
The optical constants of thin films of TiNx, prepared by means of reactive electron-beam evaporation, have been investigated at the Na-D wavelength as a function of their deviation from stoichiometry (x=1). Extreme at values of x slightly below unity were observed in the optical constants. A plausible explanation, in terms of the defect structure and bonding characteristics of the compound, is given.Keywords
This publication has 2 references indexed in Scilit:
- Effect of Defect Structure on the Optical Dispersion Properties of Thin Films of TiNxZeitschrift für Naturforschung A, 1976
- The Electrical Properties of Thin Films of TiNx and TiCxZeitschrift für Naturforschung A, 1975