Cyclotron Resonance Mass Spectrometry of Ionic Radicals in Magnetized CF4Plasma
- 1 July 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (7S)
- https://doi.org/10.1143/jjap.33.4325
Abstract
The mass distribution of ionic radicals in a magnetized CF4plasma is measured by a newly developed ion cyclotron resonance mass spectrometer (ICR-MS). The density ratio of CF+to CF3+increases with plasma density for DC discharge and decreases with CF4pressure for electron cyclotron resonance discharge. Negative ions F-and F2-are detected at a CF4gas pressure of 3–9×10-4Torr for DC discharge. Fragmentation of a CF4gas by electron beam injection is also measured by this spectrometer.Keywords
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