Pearson distributions for ion ranges
- 15 January 1983
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 42 (2) , 205-206
- https://doi.org/10.1063/1.93850
Abstract
Type IV Pearson distributions have been used by several groups to represent ion implantation range distributions. It is pointed out here that these distributions are inappropriate, and type VI (or possibly type V) distributions should be used instead. It must be remembered that these distributions are only approximations to the true range distribution.Keywords
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