Electrical characterization of low permittivity materials for ULSI inter-metal-insulation
- 1 April 2000
- journal article
- research article
- Published by Elsevier in Microelectronics Reliability
- Vol. 40 (4-5) , 675-678
- https://doi.org/10.1016/s0026-2714(99)00319-4
Abstract
No abstract availableKeywords
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- Silk Polymer Coating with Low Dielectric Constant and High Thermal Stability for Ulsi Interlayer DielectricMRS Proceedings, 1997