Stresses in silicon after boron diffusion (III) determination of lattice contraction coefficient in consideration of residual stresses
- 1 January 1971
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 6 (4) , 547-552
- https://doi.org/10.1002/crat.19710060412
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
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- Electrical Properties of Pure Silicon and Silicon Alloys Containing Boron and PhosphorusPhysical Review B, 1949