Mechanical analysis of polycrystalline and single-crystalline silicon microstructures
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 42 (1-3) , 672-679
- https://doi.org/10.1016/0924-4247(94)80073-1
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Investigations on free-standing polysilicon beams in view of their application as transducersSensors and Actuators A: Physical, 1990
- Polycrystalline and amorphous silicon micromechanical beams: annealing and mechanical propertiesSensors and Actuators, 1983
- Electrochemically Controlled Thinning of SiliconBell System Technical Journal, 1970