Binary collision cascade prediction of critical ion-to-atom arrival ratio in the production of thin films with reduced intrinsic stress
- 1 November 1987
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 28 (4) , 527-533
- https://doi.org/10.1016/0168-583x(87)90498-8
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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