Self-cleaning Langmuir probe
- 1 May 1993
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (5) , 1253-1256
- https://doi.org/10.1063/1.1144074
Abstract
A contamination‐free Langmuir probe of novel design is described. Surface contaminants, which lead to erroneous evaluation of plasma parameters by distortion of the probe’s current‐voltage characteristic, are removed by the indirect heating of the probe tip with separate heating elements running parallel to the probe wire in multibore alumina tubing. This configuration minimizes magnetic field perturbations, while maintaining the compact profile and construction ease of an unheated probe. The design and operating characteristics of such a probe are reported. Temperatures at the probe tip, as measured by a subminiature thermocouple, can exceed 500 °C. Experiments determining the effect of probe temperature, Tprobe, on the characteristic have been performed in a Q‐machine plasma (Ti≊Te≊0.2 eV). We find that for TprobeTprobe ≥300 °C, and accurate electron temperatures are recovered.Keywords
This publication has 15 references indexed in Scilit:
- Electrostatic ion-cyclotron wave experiments in the WVU Q machineIEEE Transactions on Plasma Science, 1992
- The effect of a-Si:H thin film layers on the determination of plasma parameters in an electrostatic double-probe measurementJournal of Physics D: Applied Physics, 1991
- Heated Langmuir probe measurements of reactive direct-current magnetron plasmasJournal of Vacuum Science & Technology A, 1988
- Process monitoring of a-C:H plasma depositionJournal of Vacuum Science & Technology A, 1987
- Diagnostic methods for sputtering plasmasJournal of Vacuum Science and Technology, 1978
- A systematic investigation of several phenomena associated with contaminated Langmuir probesPlanetary and Space Science, 1976
- Inaccuracies in electron density estimates due to surface contamination of Langmuir probesPlanetary and Space Science, 1976
- Surface contamination of active electrodes in plasmas: Distortion of conventional Langmuir probe measurementsJournal of Applied Physics, 1975
- Versatile plasma probeReview of Scientific Instruments, 1975
- Dielectric impurities and surface instability in Langmuir probe plasma measurementsJournal of Physics D: Applied Physics, 1974