Silicon mirrors and micromirror arrays for spatial laser beam modulation
- 1 April 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 66 (1-3) , 76-82
- https://doi.org/10.1016/s0924-4247(97)01731-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Experimental adaptation of model parameters for microelectromechanical systems (MEMS)Sensors and Actuators A: Physical, 1997
- Integration of surface-micromachined polysilicon mirrors and a standard CMOS processSensors and Actuators A: Physical, 1996
- Equivalent-circuit model of the squeezed gas film in a silicon accelerometerSensors and Actuators A: Physical, 1995
- Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processingPublished by SPIE-Intl Soc Optical Eng ,1993