Diffuse scattering of x rays from nonideal layered structures

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Abstract
A new theory of nonspecular x‐ray scattering from layered systems with random rough interfaces based on the distorted‐wave Born approximation is presented. Calculations of the diffuse scattering from a single gold layer and two W/Si multilayer mirrors has been carried out. The theory explains the existence of maxima and minima in the angular distribution of diffusely scattered intensity resulting from standing‐wave‐enhanced scattering and other dynamical effects. The influence of the mutual correlation between individual interface profiles on x‐ray scattering is discussed.