Properties of laser-sputtered Ti/Be multilayers
- 1 January 1992
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 63 (1) , 1478-1481
- https://doi.org/10.1063/1.1143047
Abstract
Characteristics of Ti/Be multilayers deposited by laser sputtering were investigated by grazing incidence x‐ray reflection. The reflectivity of mirrors was explained using exponential variation of dielectric function, the validity of scattering model was confirmed by synchrotron radiation reflectivity measurements at 1200 eV. The observed quasi‐Bragg peaks were interpreted in terms of nonspecular scattering from interfacial roughness.Keywords
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