Precision measurement of axial channel angles
- 1 January 1992
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 63 (1-2) , 56-58
- https://doi.org/10.1016/0168-583x(92)95168-q
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- High precision structural measurements on thin epitaxial layers by means of ion-channelingNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1990
- Steering effect at a strained NiSi2/Si (001) interfaceNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Superlattice interface and lattice strain measurement by ion channelingPhysical Review B, 1983