Thermal conductivity and diffusivity of a thin film SiO2Si3N4 sandwich system
- 1 July 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 188 (1) , 27-33
- https://doi.org/10.1016/0040-6090(90)90190-o
Abstract
No abstract availableThis publication has 9 references indexed in Scilit:
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