Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system
- 1 March 1998
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 41-42, 249-252
- https://doi.org/10.1016/s0167-9317(98)00057-4
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrumentMicroelectronic Engineering, 1997
- Sub-20-nm-wide line fabrication in poly(methylmethacrylate) using a Ga+ microprobeJournal of Vacuum Science & Technology B, 1989
- Transverse thermal velocity broadening of focused beams from liquid metal ion sourcesJournal of Vacuum Science & Technology B, 1988