Theoretical and experimental investigations on Coulomb interactions in a two-lens focussed ion beam instrument
- 28 February 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 35 (1-4) , 439-442
- https://doi.org/10.1016/s0167-9317(96)00180-3
Abstract
No abstract availableKeywords
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- Aberration properties of focused ion-beam induced by space charge effectJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Measurement of virtual crossover in liquid gallium ion sourceApplied Physics Letters, 1983