Influence of Beam Current Ripple on Secondary Electron and RBS Mapping Images
- 1 June 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (6A) , L1011-1014
- https://doi.org/10.1143/jjap.29.l1011
Abstract
The influence of beam current ripple on Rutherford backscattering (RBS) and secondary electron mapping images using 400 keV He+ ion beams with a beam spot size of about 1 µm has been investigated to clarify the degradation of mapping images due to the current fluctuation. It was found that the secondary electron mapping images were deteriorated by a beam fluctuation of more than a few percent, while the RBS mapping image was rather insensitive to fluctuations of up to 50%.Keywords
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