Tomography of Microstructures by Scanning Micro-RBS Probe
- 1 July 1989
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 28 (7A) , L1286-1289
- https://doi.org/10.1143/jjap.28.l1286
Abstract
Tomographic images of microstructures were nondestructively obtained by Rutherford backscattering (RBS) analysis using 1.8 MeV proton and helium ion microprobes. Multilayered Au stripes isolated by SiO2 layers and a Ge island pattern below an SiO2 capping layer were cross-sectionally imaged without cleaving the substrate or removing the upper layer. The agglomeration of the Ge island after zone-melting recrystallization (ZMR) could be detected by tomographic images.Keywords
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