Design of a compact nuclear microprobe system with a liquid metal ion source
- 1 May 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 77 (1-4) , 25-28
- https://doi.org/10.1016/0168-583x(93)95517-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- FORMATION OF HIGH ENERGY MICROBEAMS AND THEIR APPLICATION TO MICROELECTRONICSInternational Journal of PIXE, 1992
- Damage induced during channeling measurements with a nuclear microprobeNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Evaluation of beam-induced ablation during microbeam irradiationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1991
- Emission Characteristics of Au-Si-Be LM Ion SourceJapanese Journal of Applied Physics, 1985