Emission Characteristics of Au-Si-Be LM Ion Source
- 1 May 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (5A) , L288
- https://doi.org/10.1143/jjap.24.l288
Abstract
Variation of relative fluxes of ion species emitted from a Au-Si-Be liquid metal (LM) ion source with various alloy compositions has been studied for the practical use of the ion source. The Si ion flux (Si++Si++) decreases with an increase in Be concentration because of the reduction of Si solubility in the molten alloy. As the flux of Si ions decreases, the ratio of Si++/Si+ increases remarkably. The mechanism of these phenomena is also discussed.Keywords
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