Characteristics of Be–Si–Au Ternary Alloy Liquid Metal Ion Sources
- 1 November 1983
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 22 (11A) , L692
- https://doi.org/10.1143/jjap.22.l692
Abstract
Be-Si-Au ternary alloy liquid metal ion sources have been fabricated and basic characteristics such as mass spectra, energy distribution and angular current intensity have been measured. It was observed that for Be and Si, doubly charged ions are dominant over singly charged ions and the angular current intensity for the doubly charged ions is about 20 and 11 µA/str for Be and Si, respectively, at an energy spread (FWHM) of 10 eV. The present ion source could be operated for about 100 hours and is important for maskless implantation of both p- and n-type dopants in GaAs.Keywords
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