The effects of the annealing temperature on the formation of helium-filled structures in silicon
- 1 January 1999
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 148 (1-4) , 329-333
- https://doi.org/10.1016/s0168-583x(98)00714-9
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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