Control of Crystal Orientations in Lattice-Mismatched SrF2 and (Ca, Sr)F2 Films on Si Substrates by Intermediate CaF2 Films

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Abstract
Crystal orientations of SrF2 and (Ca, Sr)F2 films on Si(100) and (111) substrates were controlled by intermediate CaF2 films which were grown on the substrates prior to growth of lattice-mismatched fluoride films. SrF2 films with good crystalline quality were grown epitaxially on the CaF2/Si(100) structure, though the SrF2 films directly grown on Si(100) were mainly composed of preferentially (111) oriented crystallites. Similarly, (Ca, Sr)F2 films on Si(111) changed from epitaxial films with internal boundaries between regular and rotationally twinned crystallites to single crystal ones by use of the intermediate CaF2 films.

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