The investigation of ion implanted layers by scanning electron microscopy
- 1 June 1976
- journal article
- Published by Springer Nature in Applied Physics A
- Vol. 10 (2) , 111-119
- https://doi.org/10.1007/bf00896330
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Sputtering during ion implantation into gallium arsenideApplied Physics B Laser and Optics, 1975
- Raster-ElektronenmikroskopiePublished by Springer Nature ,1973
- Sputtering and Strain of Silicon by Ion ImplantationJournal of Applied Physics, 1971
- Die Anwendung eines Mehrfach-Detektorsystems zur stereoskopischen Rasterbeobachtung in der Elektronenstrahl-MikroanalyseMicrochimica Acta, 1965