Low-cost uncooled infrared detectors in CMOS process
- 1 December 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 109 (1-2) , 102-113
- https://doi.org/10.1016/j.sna.2003.08.013
Abstract
No abstract availableKeywords
This publication has 21 references indexed in Scilit:
- A comment on the reported detectivity of a new uncooled thermal infrared detectorSensors and Actuators A: Physical, 2002
- Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor arrayJournal of Microelectromechanical Systems, 2001
- A new uncooled thermal infrared detector using silicon diodeSensors and Actuators A: Physical, 2001
- A high fill-factor infrared bolometer using micromachined multilevel electrothermal structuresIEEE Transactions on Electron Devices, 1999
- Characterization and optimization of infrared poly SiGe bolometersIEEE Transactions on Electron Devices, 1999
- A 1024-element bulk-micromachined thermopile infrared imaging arraySensors and Actuators A: Physical, 1999
- An integrated thermopile structure with high responsivity using any standard CMOS processSensors and Actuators A: Physical, 1998
- Laminated high-aspect-ratio microstructures in a conventional CMOS processSensors and Actuators A: Physical, 1996
- Uncooled thermal imaging with monolithic silicon focal planesPublished by SPIE-Intl Soc Optical Eng ,1993
- A new approach for the fabrication of micromechanical structuresSensors and Actuators, 1989