Effect of resonant microwave power on a Penning ionization gauge ion source
- 1 October 1985
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 56 (10) , 1894-1896
- https://doi.org/10.1063/1.1138440
Abstract
Microwave power resonant to the local electron cyclotron frequency has been coupled into the plasma discharge chamber of a hot-cathode PIG (Philips or Penning Ionization Gauge) ion source. The extracted ion beam was monitored for changes in characteristics of the beam with and without application of the microwave power. No change was seen in the ion charge state distribution. A small but significant reduction in the beam noise level was seen, and this technique may thus find application in situations where beam quiescence is important.Keywords
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