Bias effect of ion-plated zirconium nitride film on Si(100)
- 1 February 2002
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 405 (1-2) , 162-169
- https://doi.org/10.1016/s0040-6090(01)01762-x
Abstract
No abstract availableKeywords
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