Material properties of ZrN film on silicon prepared by low-energy ion-assisted deposition
- 31 August 1994
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 66 (1-3) , 318-322
- https://doi.org/10.1016/0257-8972(94)90021-3
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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