AES sputter profiling and angle resolved XPS of in situ grown very thin Tantalum‐oxide films
- 1 April 1984
- journal article
- research article
- Published by Wiley in Surface and Interface Analysis
- Vol. 6 (2) , 82-89
- https://doi.org/10.1002/sia.740060209
Abstract
No abstract availableKeywords
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