Electrical resistivity, structure and composition of d.c. sputtered WNx films
- 1 November 1997
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 310 (1-2) , 222-227
- https://doi.org/10.1016/s0040-6090(97)00348-9
Abstract
No abstract availableKeywords
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