MIS solar cells with back surface fields

Abstract
Al‐SiOxpSi MIS solar cells have been fabricated on 10‐Ω cm substrates both with and without back surface fields. The back‐surface‐field structure has been found to significantly enhance the open‐circuit voltage of these cells, and Voc values in excess of 580 mV have been recorded at photocurrent densities of 300 A m−2. These results provide further evidence that MIS diodes can be produced in which the dark current is dominated by minority‐carrier flows.