Crystalline to Amorphous Transformation in Ion-Bombarded Silicon
- 1 January 1971
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- LOCALIZED MODES AND DIVACANCY ABSORPTION IN OXYGEN ION IMPLANTED SiApplied Physics Letters, 1970
- LATTICE EXPANSION AND STRAIN IN ION-BOMBARDED GaAs AND SIApplied Physics Letters, 1970
- ESR AND OPTICAL ABSORPTION STUDIES OF ION-IMPLANTED SILICONApplied Physics Letters, 1970
- Spatial distribution of energy deposited into atomic processes in ion-implanted siliconRadiation Effects, 1970
- Infrared studies of the crystallinity of ion-implanted SiRadiation Effects, 1970