Manufacturing issues of thin film NiTi microwrapper
- 1 September 2001
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 93 (2) , 148-156
- https://doi.org/10.1016/s0924-4247(01)00646-x
Abstract
No abstract availableKeywords
This publication has 22 references indexed in Scilit:
- Sputter deposition of NiTi thin film shape memory alloy using a heated targetThin Solid Films, 2000
- NiTi thin films as a gate of M.O.S. capacity sensorsSensors and Actuators A: Physical, 1999
- Thin-film shape-memory alloy actuated micropumpsJournal of Microelectromechanical Systems, 1998
- Two thin film shape memory alloy microactuatorsIEEJ Transactions on Sensors and Micromachines, 1997
- Thin film shape memory alloy microactuatorsJournal of Microelectromechanical Systems, 1996
- Dynamics of Thin Film NiTi Cantilevers on SiMRS Proceedings, 1993
- A Silicon-Based Shape Memory Alloy MicrovalveMRS Proceedings, 1992
- Thin-film processing of TiNi shape memory alloySensors and Actuators A: Physical, 1990
- AN ELECTROCHEMICAL INVESTIGATION OF SOLID CADMIUM-GOLD ALLOYSJournal of the American Chemical Society, 1932
- Analysis of Bi-Metal ThermostatsJournal of the Optical Society of America, 1925