Determination of low levels of carbon in Czochralski silicon
- 1 October 1985
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 47 (7) , 705-707
- https://doi.org/10.1063/1.96065
Abstract
The C(3) vibrational lines at 865 and 1115 cm−1 are shown to correlate in intensity with the 790-meV vibronic band in irradiated Czochralski silicon. The C(3)/790 meV lines may be used as a sensitive measure of the concentration of carbon in silicon.Keywords
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